Number of furnace tubes: 1-4 tubes
Process pipe diameter: Φ 90-360 mm (3-12 inches)
Length of constant temperature zone: 760～1000 mm±1.0℃ (300～800℃) 760～1000 mm±0.5℃(800～1280℃)
Single point stability: ±1.0℃/24h (300～800℃) ±0.5℃/24h (800～1280℃)
Number of gas sources: ≤ 7, can be equipped with constant temperature source bottle and hydrogen oxygen synthesis igniter
Gas Control: Float/Mass Flow Meter
Cantilever boat parameters: speed: 20-1000 mm/min Travel: 2000 mm Positioning accuracy: ± 1 mm Load: 17 Kg
Ultra clean workbench: Purification level: 100 level (10000 level factory building)
Noise: ≤ 62dB（A）
Vibration: ≤ 3μm
