Main technical indicators of the equipment:
1. Working temperature range: 400-1200 ℃
2. Length of constant temperature zone: ≥ 300mm
3. Accuracy of constant temperature zone: ± 0.5 ℃/300mm
4. Gas system: A three-way gas system using imported MKS mass flow meters, pneumatic valves, and other imported components
5. Temperature control system: PLC+touch screen programmable control mode, automatic and manual can be easily switched
6. Diffusion method: The equipment is equipped with a vacuum system and supports negative pressure diffusion method
7. Alarm and protection: Automatic alarm and protection for overheating, disconnection, water shortage, and vacuum abnormalities in the system
