Furnace body
1、 Furnace material:
★ Furnace wire: Φ 8~Φ 10mm Kangtai Er/Jitai An high-temperature electric heating alloy wire.
★ Insulator: Made of 99 porcelain, with high legs for silicon carbide pipes and low legs for quartz pipes.
★ Thermal insulation cotton: using high-temperature insulation materials produced by Morgan Stanley in the UK.
★ Shell: Made of rolled 304 stainless steel plate, connected by stainless steel rivets at the joints.
★ Thermocouple seat: Imported spring card shaped fixed seat.
★ Mouth Ring: Ceramic fiber mouth ring, which not only provides insulation but also has a certain mechanical strength.
2、 Furnace parameters:
★ Working temperature: ≤ 1300 ℃
★ Constant temperature zone length: 500mm-1000mm
★ Inner diameter of furnace body: Φ 90~Φ 360 mm (3~12 inches)
★ Standardized use: The lifespan can reach more than 20 months (1200 ℃)
★ Alternative imports: comprehensive supporting facilities
3、 Application:
The diffusion furnace body produced by Qingdao Chenli Electronics Co., Ltd. is mainly used as a heating device for tubular hot wall systems in industries such as semiconductors, power devices, and integrated circuits. It can be matched with various types of diffusion furnaces from abroad, such as TEMPRESS, THERMCO from the United States, ASM from the Netherlands, BTU from the United Kingdom, etc. (replacing imports), using advanced processing techniques and imported materials. It can be applied to diffusion furnaces for processing 3-12 inch silicon wafers and solar cell diffusion furnaces
