Application of oxidation diffusion furnace products: Used in integrated circuits, discrete devices, optoelectronic devices, power electronic devices, solar cells and other fields, suitable for 2-8 inch process sizes
Characteristics of diffusion furnace products:
Industrial computer control system, which automatically controls furnace temperature, advance and retreat of boats, gas flow rate, valves and other actions
◆ Adopting a cantilever feeder: easy to operate, no friction pollution, etc
All key components are imported to ensure high reliability of the equipment
The process pipeline is composed of imported valve fittings - with good airtightness, corrosion resistance, and no pollution (all pipelines use EP grade electric polishing pipelines), and the flow control adopts imported mass flow meters (MFC)
High temperature control accuracy and good stability of temperature control in the temperature zone;
Main technical indicators of diffusion furnace
Working temperature: 200-1300 ℃
Heating element control point: 3/5 points
◆ Constant temperature zone of furnace body: 450mm/600mm/800mm/1100mm
Accuracy of constant temperature zone: ＞ 800 ℃/± 0.5 ℃, ＜ 800 ℃/± 1 ℃
Single point temperature stability: 600-1300 ℃/± 0.5 ℃/24h
Maximum controllable heating rate: 15 ℃/min
Maximum cooling rate: 5 ℃/min (900-1300 ℃)
Power supply: three-phase four wire, 380VAC/50HZ
Local purification level: Level 100.
◆ Oxidation system: dry oxygen, wet oxygen (hydrogen oxygen internal and external ignition)
