RTP tube annealing furnace and vacuum alloy furnace are non-standard customized equipment used for advanced materials that require processing under high vacuum, rapid temperature rise and fall conditions. They can be customized according to different customer needs.
Main technical parameters
◆ Number of process tubes: 1 tube
Process pipe diameter: Φ 90-360mm (3-12 inches)
◆ Structural type: horizontal hot wall type
Working temperature range: 200-1100 ℃
◆ Constant temperature zone length and accuracy: ± 1 ℃/600mm
Air tightness of the pneumatic system: 1 × 10-7pa.m3/s
Vacuum degree: 3 × 10-4Pa
Heating rate: 60 degrees per minute
Cooling rate: 60 degrees per minute
Control mode: Industrial microcomputer control
◆ Record the number of process curves and steps without restriction
