Main technical parameters
◆ Structural type: horizontal hot wall type
Working temperature range: 300-1280 ℃
◆ Constant temperature zone length and accuracy: ± 0.5 ℃/1080mm
Gas flow rate setting accuracy: ± 1% F S
◆ Airtightness of the pneumatic system: 1×10-7pa.m3/s
Process uniformity: ≤± 5% (30~60 ohms)
Control mode: Industrial microcomputer control
◆ Record the number of process curves and steps without restriction
